Abstract:
In this brief, we propose an innovative program scheme to mitigate z -direction interference ( Z -interference) in charge-trap-based 3-D NAND flash memory. Our approach adjusts the position of trapped electrons in charge trap nitride (CTN) layer during the program operation by varying the pass voltage ( Vpass ) on both side word lines (WLs) of the selected WL. Specifically, cells with a high threshold voltage ( Vth ) place electrons in the program direction, whereas cells with a low Vth place electrons in the opposite direction. Depending on the program-verify (PV) level pattern of the aggressor (Agr)-victim cell (Vic), the effective gate pitch can be modified, even though the physical gate pitch is fixed. We validate our proposed scheme using technology computer-aided design (TCAD) simulations and experimental measurements.