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[2005 International Semiconductor Device Research Symposium] Isolation Method for Bulk FinFET without Using CMP Process

기간

December 7-9, 2005

참가자

Il Hwan Cho, Junsoo Kim, Il Han Park, Hyungcheol Shin, Byung-Gook Park, Jong Duk Lee, and Jong-Ho Lee

대회명

2005 International Semiconductor Device Research Symposium

Il Hwan Cho, Junsoo Kim, Il Han Park, Hyungcheol Shin, Byung-Gook Park, Jong Duk Lee, and Jong-Ho Lee, “Isolation Method for Bulk FinFET without Using CMP Process,” 2005 International Semiconductor Device Research Symposium, Maryland, U.S.A., December 7-9, 2005