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Home · [2006 The 13th Korean Conference on Semiconductors] Isolation Method for Bulk FinFET without Using CMP Process
Home · [2006 The 13th Korean Conference on Semiconductors] Isolation Method for Bulk FinFET without Using CMP Process

[2006 The 13th Korean Conference on Semiconductors] Isolation Method for Bulk FinFET without Using CMP Process

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Feb. 23-24, 2006

참가자

Il Hwan Cho, Junsoo Kim, Il Han Park, Hyungcheol Shin, Byung-Gook Park, Jong Duk Lee, and Jong-Ho Lee

대회명

The 13th Korean Conference on Semiconductors

Il Hwan Cho, Junsoo Kim, Il Han Park, Hyungcheol Shin, Byung-Gook Park, Jong Duk Lee, and Jong-Ho Lee, “Isolation Method for Bulk FinFET without Using CMP Process,” The 13th Korean Conference on Semiconductors, Jeju, Korea, pp. 1281-1282, Feb. 23-24, 2006

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