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[2008 Silicon Nanoelectronics Workshop] Improving the cell characteristics using arch-active profile

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Dae Woong Kang, Sungnam Chang, Jung Hun Lee, Il Han Park, Seunggun Seo, Gideok Kwon, Kyungmi Bae, Inyoung Kim, Eunjung Lee, Jeong-Hyuk Choi, Byung-Gook Park, Jong Duk Lee, Hyungcheol Shin, “Improving the cell characteristics using arch-active profile in NAND flash memory having 60 nm design rule”, Silicon Nanoelectronics Workshop, pp.0-0, Jun. 2008