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[2008 The 15th Korean Conference on Semiconductors, Pyeongchang, Korea] Extraction of interface states energy profile by using high frequency charge pumping technique in pure and remote plasma nitrided oxides

기간

Feb. 20-22, 2008

참가자

Younghwan Son, Seungwon Yang, Bongchan Kim, Jinho Kim, Chang-Rok Moon, Duckhyung Lee, Jong Duk Lee, Byung-Gook Park, Hyungcheol Shin

대회명

The 15th Korean Conference on Semiconductors

Younghwan Son, Seungwon Yang, Bongchan Kim, Jinho Kim, Chang-Rok Moon, Duckhyung Lee, Jong Duk Lee, Byung-Gook Park, Hyungcheol Shin, “Extraction of interface states energy profile by using high frequency charge pumping technique in pure and remote plasma nitrided oxides”, The 15th Korean Conference on Semiconductors, Pyeongchang, Korea, pp.631-632, Feb. 20-22, 2008