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[2010 Korean Conference on Semiconductors] 3-D stacked NAND Flash String with Single-Crystal Si Channel by Adopting Si/SiGe Selective Etch Process

기간

Feb. 2010

참가자

Ju-Wan Lee, Min-Kyu Jeong, Hyuck-In Kwon, Byung-Gook Park, Hyungcheol Shin, and Jong-Ho Lee

대회명

Korean Conference on Semiconductors

Ju-Wan Lee, Min-Kyu Jeong, Hyuck-In Kwon, Byung-Gook Park, Hyungcheol Shin, and Jong-Ho Lee, “3-D stacked NAND Flash String with Single-Crystal Si Channel by Adopting Si/SiGe Selective Etch Process,” Korean Conference on Semiconductors, pp. 280-281, Feb. 2010