[2015 KCS] The Comparison of Electrical Characteristics Between Nanoplate Fet and FinFET for 5 nm node Technology

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[2015 KCS] The Comparison of Electrical Characteristics Between Nanoplate Fet and FinFET for 5 nm node Technology

기간

2015

참가자

Duckseong Kang, Jongsu Kim and Hyungcheol Shin

대회명

Korean Conference on Semiconductors

Duckseong Kang, Jongsu Kim and Hyungcheol Shin, “The Comparison of Electrical Characteristics Between Nanoplate Fet and FinFET for 5 nm node Technology” Korean Conference on Semiconductors(KCS), 2015.

[2015 KCS] The Comparison of Electrical Characteristics Between Nanoplate Fet and FinFET for 5 nm node Technology

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