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[2016 ISDRS] Analysis of Self Heating Effects on vertical FET according to Shallow Trench Isolation

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Ilho Myeong, Dokyun Son, Hyunsuk Kim, Myounggon Kang and Hyungcheol Shin, “Analysis of Self Heating Effects on vertical FET according to Shallow Trench Isolation”, International Semiconductor Device Research Symposium(ISDRS), 2016.