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[2016 ISDRS] Investigation of Dual-k Spacer with Different Materials for Nanowire-FET Performance

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Hyungwoo Ko, Jongsu Kim, Myounggon Kang and Hyungcheol Shin, “Investigation of Dual-k Spacer with Different Materials for Nanowire-FET Performance”, International Semiconductor Device Research Symposium(ISDRS), 2016.