Kyul Ko, Dokyun Son, Myounggon Kang and Hyungcheol Shin, “Analysis of Work Function Variation and Process Variation effect for 5nm node 3D Stacked Nanowire FET Devices”, 20th International Vacuum Congress, 2016.
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대회명
Kyul Ko, Dokyun Son, Myounggon Kang and Hyungcheol Shin, “Analysis of Work Function Variation and Process Variation effect for 5nm node 3D Stacked Nanowire FET Devices”, 20th International Vacuum Congress, 2016.