[2016 IVC] Analysis on Self Heating Effect on Trench Structure in 5 nm node 3D Stacked Nanowire FET

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[2016 IVC] Analysis on Self Heating Effect on Trench Structure in 5 nm node 3D Stacked Nanowire FET

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Hyunsuk Kim, Youngsoo Seo, Ilho Myeong, Myounggon Kang and Hyungcheol Shin, “Analysis on Self Heating Effect on Trench Structure in 5 nm node 3D Stacked Nanowire FET”, 20th International Vacuum Congress, 2016

[2016 IVC] Analysis on Self Heating Effect on Trench Structure in 5 nm node 3D Stacked Nanowire FET

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