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[2016 IVC] Fundamental trade-off between Parasitic Resistance and Capacitance in a Nanowire-FET Tech

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Hyungwoo Ko, Jongsu Kim, Myounggon Kang and Hyungcheol Shin, “Fundamental trade-off between Parasitic Resistance and Capacitance in a Nanowire-FET Technology”, 20th International Vacuum Congress, 2016.