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[2016 Nano Korea] Analysis and Comparison of Work Function Variation for 5nm node Single Nanowire FET and 3D Stacked Nanowire FET Devices

기간

2016

참가자

Kyul Ko, Dokyun Son, Myounggon Kang and Hyungcheol Shin

대회명

NANO Korea

Kyul Ko, Dokyun Son, Myounggon Kang and Hyungcheol Shin, “Analysis and Comparison of Work Function Variation for 5nm node Single Nanowire FET and 3D Stacked Nanowire FET Devices”, Nano Korea, 2016.