Dokyun Son, Kyul Ko, Myounggon Kang and Hyungcheol Shin, “Characteristics of Vth variation according to parameters of line edge roughness (LER) in 5 nm node Nano-wire FET”, Nano Korea, 2016.
기간
2016
참가자
Dokyun Son, Kyul Ko, Myounggon Kang and Hyungcheol Shin
대회명
NANO Korea
Dokyun Son, Kyul Ko, Myounggon Kang and Hyungcheol Shin, “Characteristics of Vth variation according to parameters of line edge roughness (LER) in 5 nm node Nano-wire FET”, Nano Korea, 2016.