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[2017 ICSPD] Optimal Integration and Electrical Characteristics for Ultra-Scaled Nanoplate Vertical

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Youngsoo Seo, Kyul Ko, Changbeom Woo, Minsoo Kim, Shinkeun Kim, Myounggon Kang and Hyungcheol Shin, “Optimal Integration and Electrical Characteristics for Ultra-Scaled Nanoplate Vertical FET, 6T-SRAM”, International Conference on Semiconductor Physics and Device (ICSPD), 2017.