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[2017 SNW] Comparison of Parasitic Components between LFET and VFET using 3D TCAD

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대회명

Minsoo Kim, Hyungwoo Ko, Myounggon Kang and Hyungcheol Shin, “Comparison of Parasitic Components between LFET and VFET using 3D TCAD”, Silicon Nanoelectronics Workshop(SNW), 2017.