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[2017 SNW] Improvement of Dual-k spacer for Nanowire-FETs considering Circuit Delay and Electricstat

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Hyungwoo Ko, Jongsu Kim, Dokyun Son, Myounggon Kang, and Hyungcheol Shin, “Improvement of Dual-k spacer for Nanowire-FETs considering Circuit Delay and Electricstatic Controllability”, Silicon Nanoelectronics Workshop(SNW), 2017.