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[2018 KCS] Thickness Margin of Ferroelectric Layer for Aspect Ratio Variation in Negative Capacitance Nanowire FET

기간

2018

참가자

Jangkyu Lee, Changbeom Woo, Jongsu Kim, Myounggon Kang, and Hyungcheol Shin

대회명

Korean Conference on Semiconductors

Jangkyu Lee, Changbeom Woo, Jongsu Kim, Myounggon Kang, and Hyungcheol Shin, “Thickness Margin of Ferroelectric Layer for Aspect Ratio Variation in Negative Capacitance Nanowire FET”, Korea Conference on Semiconductor (KCS), 2018.