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[2019 EDTM] Modeling of Channel Current in Sub-threshold Region for Poly-Si based Macaroni Structure

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Juhyun Kim, Ilho Myeong, Minsoo Kim, Sungbak Kim, Myounggon Kang, Jongwook Jeon, and Hyungcheol Shin, “Modeling of Channel Current in Sub-threshold Region for Poly-Si based Macaroni Structure in 3D NAND Flash Memories”, IEEE Electron Devices Technology and Manufacturing Conference (EDTM), 2019.