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[2019 KCS] Comparison of Self-heating Effects in 3.5nm Node Nanoplate-FET Using Corner Spacer

기간

2019

참가자

Hyunwoo Kim, Hyunsuk Kim, Myounggon Kang, Jongwook Jeon, and Hyungcheol Shin

대회명

Korean Conference on Semiconductors

Hyunwoo Kim, Hyunsuk Kim, Myounggon Kang, Jongwook Jeon, and Hyungcheol Shin, “Comparison of Self-heating Effects in 3.5nm Node Nanoplate-FET Using Corner Spacer”, Korea Conference on Semiconductor (KCS), 2019.