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[2019 KCS] Interplay Between Line Edge Roughness and Interface Traps in Nanoplate VFETs

기간

2019

참가자

Yeaji Yoo, Kyul Ko, Myounggon Kang, Jongwook Jeon, and Hyungcheol Shin

대회명

Korean Conference on Semiconductors

Yeaji Yoo, Kyul Ko, Myounggon Kang, Jongwook Jeon, and Hyungcheol Shin, “Interplay Between Line Edge Roughness and Interface Traps in Nanoplate VFETs”, Korea Conference on Semiconductor (KCS), 2019.