3D Technology Computer-Aided Design-Based Optimization of Channel Radius Considering Line Edge Roughness on Gate-All-Around Nanowire FET

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Home · 3D Technology Computer-Aided Design-Based Optimization of Channel Radius Considering Line Edge Roughness on Gate-All-Around Nanowire FET

저자

Dokyun Son, Kyul Ko, Myounggon Kang and Hyungcheol Shin

저널 정보

Journal of Nanoscience and Nanotechnology

출간연도

2017

링크