In this paper, a comparison of gate-all-around nanowire-FETs, nanoplate (NP)-FETs, and FinFETs was undertaken for the same areas of not only the gate metal but also the silicon channel, assuming the same conditions regarding the parasitic components. It is known that an NP-FET structure not only improves the delay performance but also enhances the immunity to short-channel effects. In addition, it is found that the use of a dual-k spacer with an NP-FET further improves the on-state as well as the off-state performances.