Investigation of Work Function Variation Induced by Metal Gate and Process Variation Effect in 3D Stacked Nanowire FET Devices

Home · Investigation of Work Function Variation Induced by Metal Gate and Process Variation Effect in 3D Stacked Nanowire FET Devices

저자

Kyul Ko, Dokyun Son, Changbeom Woo, Myounggon Kang and Hyungcheol Shin

저널 정보

Journal of Nanoscience and Nanotechnology

출간연도

2017

링크