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A Vertical 4-Bit SONOS Flash Memory and a Unique 3-D Vertical nor Array Structure

저자

Yoon Kim, Il Han Park, Seongjae Cho, Jang-Gn Yun, Jung Hoon Lee, Doo-Hyun Kim, Gil Sung Lee, Se Hwan Park, Dong Hua Li, Won Bo Shim, Wandong Kim, Hyungcheol Shin, Jong Duk Lee, and Byung-Gook Park

저널 정보

IEEE Transactions on Nanotechnology

출간연도

2010

Abstract:

In order to overcome the limitation of a multibit silicon–oxide–nitride–oxide–silicon (SONOS) memory with multistorage nodes, we propose a unique 3-D vertical nor (U3VNOR) array architecture. The U3VNOR has a vertical channel so that it is possible to have a long enough channel without extra cell area. Therefore, we can avoid the problems such as redistribution of injected charges, second-bit effect, and short-channel effect. Also, it is the most integrated flash architecture having the smallest unit cell size, which is 1 F2/bit. In this paper, we present the fabrication method and the operation voltage scheme of the U3VNOR. In addition, through numerical simulation, we verify its program and erase characteristics. Due to its high density and reliable multibit operation, the U3VNOR is a promising structure for the future high-density nor flash memory.