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Fabrication and characterization of fin SONOS flash memory with separated double-gate structure

저자

Jang-Gn Yun, Yoon Kim, Il Han Park, Jung Hoon Lee, Sangwoo Kang, Dong-Hua Lee, Seongjae Cho, Doo-Hyun Kim, Gil Sung Lee, Won-Bo Sim, Younghwan Son, Hyungcheol Shin, Jong Duk Lee, and Byung-Gook Park

저널 정보

Solid-State Electronics

출간연도

2008

Abstract: 

In this work, we have fabricated and characterized the 3-dimensional fin SONOS flash memory. This device has two independent gates on both sides of Si-fin and each of them governs two side-channels. Fabrication flow and array structure are described as well as operation schemes. The 4-bit/cell operation is demonstrated with the multi-bit concept in fabricated devices. Some fabrication issues related with device characteristics and reliabilities are delivered.