바로가기 메뉴
본문 바로가기
푸터 바로가기
TOP

 

The novel SCR-based ESD protection with low triggering and high holding voltages

저자

Myounggon Kang, Ki-Whan Song, Byung-Gook Park, and Hyungcheol Shin

저널 정보

Microelectronics Journal

출간연도

2011

Abstract: 

This paper introduces a novel silicon controlled rectifier (SCR)-based circuit. The proposed device using 70 nm DRAM process obtained the high holding and low triggering voltages by using variable IR drop. These characteristics enable to discharge electrostatic discharge (ESD) current and ensure latch-up immunity for normal operations. Also, the proposed scheme is easily implemented through the modification of the metal connection compare to the conventional SCR-based device. We investigated electrical characteristics by both measurements and TCAD simulations. Measurement results showed the proposed SCR had triggering voltage of 6.2 V, holding voltage of 3.3 V, and the second breakdown current of 58 mA/μm.